PHYS535 FUNDAMENTALS OF SILICON TECHNOLOGY I
| Course Code: | 2300535 |
| METU Credit (Theoretical-Laboratory hours/week): | 3 (3.00 - 0.00) |
| ECTS Credit: | 8.0 |
| Department: | Physics |
| Language of Instruction: | English |
| Level of Study: | Graduate |
| Course Coordinator: | Prof.Dr. HANDE TOFFOLİ |
| Offered Semester: | Fall or Spring Semesters. |
Course Objectives
Course Content
Basic processes: oxidation, doping, silicon thin film growth (amorphous, polycrystalline, single- crystalline).