ME448 FUNDAMENTALS OF MICRO ELECTROMECHAN.SYST.&MICROSYST.
| Course Code: | 5690448 |
| METU Credit (Theoretical-Laboratory hours/week): | 3 (3.00 - 0.00) |
| ECTS Credit: | 5.0 |
| Department: | Mechanical Engineering |
| Language of Instruction: | English |
| Level of Study: | Undergraduate |
| Course Coordinator: | Assoc.Prof.Dr. KIVANÇ AZGIN |
| Offered Semester: | Fall and Spring Semesters. |
Course Objectives
The main objective of this course is to introduce students the basic concepts in MicroElecroMechanical System (MEMS) design and manufacturing. Taking this course, students would have an insight in manufacturing techniques of micro systems, effects of scaling down in physical systems and design principles of electrostatic, piezoelectric, piezoresistive, thermal and fluidic micro structures in micro domain.
Course Content
Introduction; overview of Micro Electromechanical Systems (MEMS) and microsystems. Working principles of microsystems. Engineering science and engineering mechanics topics for Microsystems design and fabrication. Application of thermofluid engineering principles in microsystems design. Scaling laws and miniaturization. Materials for MEMS and microsystems. Microsystem manufacturing processes. Microsystem design and packaging.
Course Learning Outcomes
Ability to understand, identify and explain working principles of MEMS.
Ability to apply engineering science knowledge to design of MEMS.
Ability to apply engineering science knowledge to fabrication of MEMS.
Ability to apply mechanics of deformable solids knowledge for design of MEMS.
Ability to apply mechanical vibration knowledge for design of MEMS.
Ability to apply thermomechanics knowledge for design of MEMS.
Ability to apply scaling laws for conceptual designof MEMS.
Have information on different materials used for ME MS applications,together with their application areas, advantages and disadvantages.
Have information on different microfabrication processes used for MEMS applications, together with their application areas, advantages and disadvantages. Ability to make design and prepare a design project.
Ability to perform designcalculations and present them 196 in a formatted, organized and neat way.
Ability to present the outcomes of the design in form of engineering drawings.
Program Outcomes Matrix
| Contribution | |||||
| # | Program Outcomes | No | Yes | ||
| 1 | Ability to establish the relationship between mathematics, basic sciences and engineering sciences with engineering applications. | ✔ | |||
| 2 | Ability to find and interpret information | ✔ | |||
| 3 | Ability to follow the literature and technology related to his/her topic of interest | ✔ | |||
| 4 | Recognition of the need to keep oneself up to date in his/her profession | ✔ | |||
| 5 | Possession of written and oral communication skills | ✔ | |||
| 6 | Ability to conduct team work (within the discipline, inter-disciplinary, multi-disciplinary) | ✔ | |||
| 7 | Ability to produce original solutions | ✔ | |||
| 8 | Use of scientific methodology in approaching and producing solutions to engineering problems and needs | ✔ | |||
| 9 | Openness to all that is new | ✔ | |||
| 10 | Ability to conduct experiments | ✔ | |||
| 11 | Ability to do engineering design | ✔ | |||
| 12 | Awareness of engineering ethics, knowledge and adoption of its fundamental elements | ✔ | |||
| 13 | Ability to take societal, environmental and economical considerations into account in professional activities | ✔ | |||
| 14 | Possession of pioneering and leadership characteristics in areas related to the profession | ✔ | |||