CHE447 CHEMICAL PROCESSES IN MICROELECTRONICS
| Course Code: | 5630447 |
| METU Credit (Theoretical-Laboratory hours/week): | 3 (3.00 - 0.00) |
| ECTS Credit: | 5.0 |
| Department: | Chemical Engineering |
| Language of Instruction: | English |
| Level of Study: | Undergraduate |
| Course Coordinator: | Prof.Dr. DENİZ ÜNER |
| Offered Semester: | Fall Semesters. |
Course Objectives
On completion of this course each student is expected to:
- Understand the concept of miniaturization and issues related to miniaturization,
- Distinguish bottom-up and top-down processes,
- Understand and distinguish the chemical, electrochemical and physical deposition techniques,
- Be able to describe diffusion processes in semiconductors and crystallization,
- Understand the tools for micromachining and be able to develop combination processes,
- Understand the governing concepts in microfluidics devices, and their manufacturing and operating tools.
Course Content
Introduction to microelectronics processing. Silicon Refining. Crystal growth. Chemical rate processes and kinetics. Chemical vapor deposition incorporation and transport of dopants. Physical and physico-chemical rate processes. Design of chemical reactors and process equipment used in microelectronics manufacturing.
Course Learning Outcomes
To develop understanding on the concept of scaling and the miniaturization,
To distinguish the bottom up and top down processes in microelectronic manufacturing,
To identify and describe basic micromachining techniques and their tools,
To identify and describe the deposition and soft lithography techniques,
To describe the governing forces at microscale and apply to microelectronic devices and microfluidics,
To demonstrate the ability to work effectively in teams in the context of a term project concerned with microelectronic manufacturing,
To demonstrate the state-of-art of microelectronic devices,
To use contemporary literature sources and to develop critical approach.
Program Outcomes Matrix
| Contribution | |||||
| # | Program Outcomes | No | Yes | ||
| 1 | An ability to identify, formulate, and solve complex engineering problems by applying principles of engineering, science, and mathematics | ✔ | |||
| 2 | An ability to apply engineering design to produce solutions that meet specified needs with consideration of public health, safety, and welfare, as well as global, cultural, social, environmental, and economic factors | ✔ | |||
| 3 | An ability to communicate effectively with a range of audiences | ✔ | |||
| 4 | An ability to recognize ethical and professional responsibilities in engineering situations and make informed judgments, which must consider the impact of engineering solutions in global, economic, environmental, and societal contexts | ✔ | |||
| 5 | An ability to function effectively on a team whose members together provide leadership, create a collaborative and inclusive environment, establish goals, plan tasks, and meet objectives | ✔ | |||
| 6 | An ability to develop and conduct appropriate experimentation, analyze and interpret data, and use engineering judgment to draw conclusions | ✔ | |||
| 7 | An ability to acquire and apply new knowledge as needed, using appropriate learning strategies | ✔ | |||